Fabrication of nanochannels with complex three-dimensional structures based on a modified atomic force microscopy nanoscratching system

A novel manufacturing method of fabricating nanochannels with complex three-dimensional (3D) structures based on a modified atomic force microscopy (AFM) nanoscratching method is presented. By changing the moving trajectories of the AFM tip, arbitrary geometric patterns were obtained. Nanochannels consisting of the superposition of geometric figures could be fabricated through extensively controlling the scanning velocity of the AFM tip and combining the movement of the AFM tip with the high-precision stage. Machining experiments were performed to demonstrate the capability, validity and flexibility of the proposed approach. Finally, nanochannels with complex 3D structures were presented in an automated, flexible but cost-effective way.