Title :
Estimation of electron densities of plasmas by terahertz time-domain spectroscopy
Author :
Kitahara, Hideaki ; Ando, Ayumi ; Kurose, Tomoko ; Kitano, Katsuhisa ; Takano, Keisuke ; Tani, Masahiko ; Hangyo, Masanori ; Hamaguchi, Satoshi
Author_Institution :
Center for Atomic & Mol. Technol., Osaka Univ., Suita, Japan
Abstract :
A new plasma diagnosis tool is developed based on terahertz time-domain spectroscopy (THz-TDS). Electromagnetic wave transmission characteristics of inductively-coupled Ar plasmas are examined by THz-TDS. The electron densities inferred from THz-TDS are found to be in good agreement with those obtained from Langmuir probe measurements.
Keywords :
Langmuir probes; electron density; terahertz spectroscopy; time-domain analysis; Langmuir probe measurements; electromagnetic wave transmission characteristics; electron densities; inductively-coupled Ar plasmas; plasma diagnosis tool; terahertz time-domain spectroscopy; Argon; Electromagnetic scattering; Electrons; Plasma density; Plasma diagnostics; Plasma measurements; Plasma properties; Plasma waves; Spectroscopy; Time domain analysis;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on
Conference_Location :
Busan
Print_ISBN :
978-1-4244-5416-7
Electronic_ISBN :
978-1-4244-5417-4
DOI :
10.1109/ICIMW.2009.5324771
