Title :
Surface chemical changes on field emitter arrays due to device aging
Author :
Wei, Yi ; Chalamala, Babu R. ; Smith, Bruce G. ; Penn, Cecil W.
Author_Institution :
Flat Panel Display Div., Motorola Inc., Tempe, AZ, USA
Abstract :
We report measurements of the surface chemical modifications of active field emission cathode arrays due to their interaction with the residual gas environment within the vacuum envelope. The micro-Auger and XPS measurements indicate accumulation of surface oxides on tips that have undergone aging.
Keywords :
Auger electron spectroscopy; X-ray photoelectron spectra; ageing; cathodes; surface chemistry; vacuum microelectronics; XPS measurements; active field emission cathode arrays; device aging; field emitter arrays; micro-Auger measurements; residual gas environment; surface chemical changes; surface oxide accumulation; vacuum envelope; Aging; Cathodes; Chemicals; Field emitter arrays; Flat panel displays; Gases; Packaging; Spectroscopy; Surface morphology; Testing;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728632
