• DocumentCode
    2318771
  • Title

    A surface and bulk micromachined angular vertical combdrive for scanning micromirrors

  • Author

    Piyawattanametha, W. ; Patterson, P. ; Wu, M. ; Hah, D. ; Toshiyoshi, H.

  • Author_Institution
    Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
  • fYear
    2003
  • fDate
    23-28 March 2003
  • Firstpage
    251
  • Abstract
    We present a high performance scanning micromirror with angular vertical comb actuators realized by combining MUMPs with a 3-mask deep-reactive-ion-etching post process. A DC scan angle of ±4° (mechanical) is achieved at 40 V.
  • Keywords
    microactuators; micromachining; micromirrors; optical scanners; sputter etching; 3-mask deep-reactive-ion-etching post process; 40 V; DC scan angle; angular vertical comb actuators; bulk micromachined angular vertical combdrive; multiuser MEMS processes; scanning micromirrors; surface micromachined angular vertical combdrive; Actuators; Application specific integrated circuits; Automatic voltage control; Etching; Fabrication; Integrated circuit technology; Micromachining; Micromirrors; Mirrors; Springs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communications Conference, 2003. OFC 2003
  • Print_ISBN
    1-55752-746-6
  • Type

    conf

  • DOI
    10.1109/OFC.2003.1247635
  • Filename
    1247635
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2318771