DocumentCode :
2320455
Title :
InGaN/GaN field emitters with a piezoelectrically-lowered surface barrier
Author :
Underwood, Robert D. ; Kozodoy, Peter ; Keller, Stacia ; BenBaars, S.P. ; Mishra, Umesh K.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA
fYear :
1998
fDate :
19-24 July 1998
Firstpage :
283
Lastpage :
284
Abstract :
The operating characteristics of field emitters are exponentially dependent on two device parameters: the field enhancement factor and the surface energy barrier height. In addition to these device parameters, the practical use of field emitters as electron sources is dependent on the stability and uniformity of field emission. We have investigated field emission from GaN field emitters because GaN has a high resistance to sputtering and is chemically inert. One drawback of GaN field emitters is that they are not easily sharpened. Thus, to lower the operating voltage of GaN-based field emitters we have investigated the lowering of the surface energy barrier using a strained-layer of InGaN on GaN field. The piezoelectric polarization produced in the strained InGaN forms a dipole much like the dipole formed by coating a surface with an electropositive adsorbate.
Keywords :
III-V semiconductors; electron field emission; gallium compounds; indium compounds; piezoelectric semiconductors; InGaN-GaN; InGaN/GaN field emitter; electron source; field emission; field enhancement factor; piezoelectric polarization; strained layer; surface energy barrier height; Chemicals; Coatings; Electron sources; Energy barrier; Gallium nitride; Piezoelectric polarization; Sputtering; Stability; Surface resistance; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
Type :
conf
DOI :
10.1109/IVMC.1998.728758
Filename :
728758
Link To Document :
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