Nonlinear Modeling Method of a Large-Displacement and Decoupled XYZ Flexure Parallel Mechanism

This paper presents a large-displacement and decoupled AYZ-flexure parallel mechanism (FPM) using typical large-displacement prismatic joints, and a nonlinear modeling method for these prismatic joints is proposed. The monolithic prismatic joints using notch hinges have large motion range of more than 1 mm, hence, the assembled XYZ-stage is large-displacement. Since the prismatic joints have small parasitic motion error and are orthogonally combined in parallel, the XYZ-stage can achieve the three decoupled translational motions. Exact stiffness and dynamics models are given using the proposed modeling method. The comparison between the proposed method and the classical pseudo-rigid-body (PRB) method is done to the example of the XYZ-stage. Finally, the experiments are conducted to verify the proposed XYZ-stage and the comparison between two methods