Compound active disturbance rejection control for resonance damping and tracking of nanopositioning

The speed of nanopositioning system is restricted by its first dominant resonant mode. Various damping techniques have been proposed to suppress the sharp resonance peak and increase the motion speed of nanopositioning system. However, most of the published approaches depend on exact models of the systems, which make the closed-loop systems be sensitive to model errors and external disturbance. In this paper, active disturbance rejection control (ADRC) and integral resonant control (IRC) are combined to restrain the resonance peak, increase the bandwidth and improve the robustness of the closed-loop system. ADRC and IRC add substantial damping for nanopositioning systems, the unique extended stated state observer (ESO) of ADRC guarantees the good disturbance rejection performance of the closed-loop system. Compound ADRC control approach improves the performance of the positioning systems, simulation results confirm the proposed control algorithm.