DocumentCode :
2323971
Title :
An active head slider using a piezoelectric cantilever for in-situ flying-height control
Author :
Suzuki, Kenji ; Maeda, Ryutaro ; Chu, Jiaru ; Kato, Takahisa ; Kurita, Masayuki
Author_Institution :
Dept. of Eng. Synthesis, Univ. of Tokyo, Japan
fYear :
2002
fDate :
27-29 Aug. 2002
Abstract :
This paper describes design and fabrication of MEMS-based active head sliders using piezoelectric unimorph cantilevers for in-situ flying-height control. Silicon sliders with PZT thin films were fabricated monolithically using a micromachining process. A deflection of more than 40 nm was obtained at the cantilever tip by applying a voltage of 4 V. Furthermore, an ABS (air bearing surface) design that makes the reduction of the aerodynamic reaction force possible during the head operation is discussed.
Keywords :
aerodynamics; disc drives; elemental semiconductors; hard discs; machine bearings; magnetic heads; microactuators; micromachining; piezoelectric actuators; piezoelectric thin films; position control; silicon; 4 V; 40 nm; ABS design; MEMS-based active head sliders; PZT thin films; PZT-Si; PbZrO3TiO3-Si; Si; aerodynamic reaction force; air bearing surface design; cantilever tip deflection; cantilever voltage; head operation; in-situ flying-height control; microactuators; microelectromechanical devices; micromachining process; piezoelectric unimorph cantilevers; silicon sliders; Aerodynamics; Fabrication; Magnetic heads; Microactuators; Micromachining; Piezoelectric films; Semiconductor thin films; Silicon; Transistors; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetic Recording Conference, 2002. Digest of the Asia-Pacific
Conference_Location :
Singapore
Print_ISBN :
0-7803-7509-2
Type :
conf
DOI :
10.1109/APMRC.2002.1037944
Filename :
1037944
Link To Document :
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