Title :
Simulation of an optical accelerometer based on integrated optical ring resonator
Author :
Zhang, Tong ; Qu, Bei-Bei ; Xue, Xiao-jun ; Zhang, Jin-Ling ; Wu, Peng-Qin ; Zhang, Xiao-yang
Author_Institution :
Key Lab. of Micro-Inertial Instrum. & Adv. Navig. Technol., Minist. of Educ., Southeast Univ., Nanjing, China
Abstract :
Tight, integrated accelerometers are current interests in Micro-Opto-electro-Mechanical-Systems (MOEMS). An optical accelerometer based on a novel integrated optical resonator is proposed. The transmission spectra and the relation between the structure parameters and the device sensitivity are simulated. This ring resonator structure shows great potential to develop high sensitive accelerometers.
Keywords :
accelerometers; integrated optics; micro-optomechanical devices; optical resonators; device sensitivity; integrated optical ring resonator; micro-opto-electro-mechanical systems; optical accelerometer; structural parameters; transmission spectra; Accelerometers; Couplers; Integrated optics; Optical devices; Optical feedback; Optical interferometry; Optical polymers; Optical resonators; Optical ring resonators; Optical sensors;
Conference_Titel :
Networking, Sensing and Control (ICNSC), 2010 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-6450-0
DOI :
10.1109/ICNSC.2010.5461579
