Future Manufacturing Technology For LC Flat Panel Display Devices

The glass substrate size will be expanded to decrease the dispaly cost because the panel cost is decided mostly by how many panels can be formed in a sub- stratethe. It causes some problems in the equipments and processes. For example, it needs deposition methods with high and uniform deposition rate and without particle, the accurate stepping alignment, uniform etching characteristics and so on. So it is important to develop the appropriate process on the Iarge-sized substrates. The self-alignment technique and dry etching process will be discussed in this paper.