• DocumentCode
    2333697
  • Title

    Nanostructure evolution of titanium dioxide layers from titanium thin films using hydrothermal treatment

  • Author

    Yang, Jung-Yen ; Cheng, Hui-Wen ; Li, Yiming

  • Author_Institution
    Nat. Nano Device Labs., Hsinchu, Taiwan
  • fYear
    2010
  • fDate
    1-3 Dec. 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In this study, a hydrothermal route is advanced for the formation of titanium dioxide nanostructures. The wetting properties and structure evolution of the hydrothermally grown TiO2 nanostructures are studied. Sputtered titanium thin films have been treated under hydrothermal conditions. The results show that the morphologies, microstructures and surface properties of the TiO2 nanostructured films vary with increasing hydrothermal treatment times. Prolonged hydrothermal treatment leads to the formation of TiO2 nanorods.
  • Keywords
    nanofabrication; nanorods; semiconductor growth; semiconductor materials; sputter deposition; surface morphology; titanium compounds; wetting; TiO2; hydrothermal treatment; microstructures; morphologies; nanostructure evolution; surface properties; titanium dioxide layers; titanium thin films; wetting properties;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on
  • Conference_Location
    Kuala Lumpur
  • Print_ISBN
    978-1-4244-8853-7
  • Type

    conf

  • DOI
    10.1109/ESCINANO.2010.5701050
  • Filename
    5701050