DocumentCode
2333697
Title
Nanostructure evolution of titanium dioxide layers from titanium thin films using hydrothermal treatment
Author
Yang, Jung-Yen ; Cheng, Hui-Wen ; Li, Yiming
Author_Institution
Nat. Nano Device Labs., Hsinchu, Taiwan
fYear
2010
fDate
1-3 Dec. 2010
Firstpage
1
Lastpage
2
Abstract
In this study, a hydrothermal route is advanced for the formation of titanium dioxide nanostructures. The wetting properties and structure evolution of the hydrothermally grown TiO2 nanostructures are studied. Sputtered titanium thin films have been treated under hydrothermal conditions. The results show that the morphologies, microstructures and surface properties of the TiO2 nanostructured films vary with increasing hydrothermal treatment times. Prolonged hydrothermal treatment leads to the formation of TiO2 nanorods.
Keywords
nanofabrication; nanorods; semiconductor growth; semiconductor materials; sputter deposition; surface morphology; titanium compounds; wetting; TiO2; hydrothermal treatment; microstructures; morphologies; nanostructure evolution; surface properties; titanium dioxide layers; titanium thin films; wetting properties;
fLanguage
English
Publisher
ieee
Conference_Titel
Enabling Science and Nanotechnology (ESciNano), 2010 International Conference on
Conference_Location
Kuala Lumpur
Print_ISBN
978-1-4244-8853-7
Type
conf
DOI
10.1109/ESCINANO.2010.5701050
Filename
5701050
Link To Document