Title :
Development of a micromanipulation system for special applications in handling of microcomponents
Author :
Petrovic, D. ; Chatzitheodoridis, E. ; Popovic, G. ; Haddad, G. ; Brenner, Walter ; Vujanic, A.
Author_Institution :
Inst. fur Feinwektech., Tech. Univ. Wien
Abstract :
A prototype system for handling, assembly and testing of microcomponents is described and demonstrated. The system is specially designed to fit inside the SEM chamber and operate under vacuum conditions but operation under an optical microscope, in atmospheric conditions, is also possible. The combination of servomotors and piezo-elements allow for a fast and precise positioning of the microparts at the submicron level
Keywords :
micromanipulators; SEM chamber; assembly; microcomponent handling; micromanipulation system; micropart positioning; optical microscope; piezo-element; servomotor; testing; Arm; Assembly systems; Grippers; Operating systems; Optical design; Production; Scanning electron microscopy; Servomotors; System testing; Vacuum systems;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 1998. ASDAM '98. Second International Conference on
Conference_Location :
Smolenice Castle
Print_ISBN :
0-7803-4909-1
DOI :
10.1109/ASDAM.1998.730225
