DocumentCode :
2342100
Title :
Ten years of RTP conference
Author :
Lojek, B.
Author_Institution :
ATMEL Corporation
fYear :
2002
fDate :
2002
Firstpage :
3
Lastpage :
10
Keywords :
Electron optics; Heating; Lamps; Manufacturing processes; Optical films; Semiconductor device manufacture; Springs; Temperature measurement; Thermal engineering; Tungsten;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2002. RTP 2002. 10th IEEE International Conference of
Print_ISBN :
0-7803-7465-7
Type :
conf
DOI :
10.1109/RTP.2002.1039432
Filename :
1039432
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2342100
