Technology development of integrated multi-modal and flexible tactile skin for robotics applications

We report the development of a multi-modal, flexible tactile sensing skin based on polymer substrates and integrated micromachining technology with increased mechanical robustness relative to silicon tactile devices. This polymer-based tactile skin is very unique because it includes the following sensing modalities beyond surface roughness and contact force measurement: thermal conductivity, hardness, temperature, and its own curvature. These new modalities allow the demonstrated tactile sensors to characterize an object or a contact event in a more comprehensive fashion. Sensing is accomplished via thin film metal gold heaters, nickel RTD´s (Resistance Temperature Device), and NiCr (nichrome) strain gauges. Experimental characterization of the sensors´ performance and potential for application to robotics are presented.