Title :
MEMS comb-actuator resonance measurement method using the 2nd harmonics of the GND current
Author :
Takahashi, Yoshikazu
Abstract :
A new method for measuring the comb-actuator resonant that uses the 2nd harmonics of the GND current is described. The method is based on the fact that the 2nd harmonics of the GND current is in proportion to the velocity of the comb-actuator. This method enables the inexpensive and stable test system
Keywords :
electric current measurement; electrostatic actuators; equivalent circuits; harmonics; resonance; testing; 2nd harmonic; MEMS comb-actuator; comb-actuator velocity; current measure system; electrostatic force; equivalent electrical circuit; ground current; resonance measurement method; stable test system; Actuators; Current measurement; Electrodes; Electrostatic measurements; Frequency; Micromechanical devices; Resonance; Velocity measurement; Vibration measurement; Voltage;
Conference_Titel :
Test Symposium, 2001. Proceedings. 10th Asian
Conference_Location :
Kyoto
Print_ISBN :
0-7695-1378-6
DOI :
10.1109/ATS.2001.990305
