MEMS for telecommunications: devices and reliability

Author

Chang, Chomg-Ping

Author_Institution

New Jersey Nanotechnolgy Consortium, Murray Hill, NJ, USA

fYear

2003

fDate

21-24 Sept. 2003

Firstpage

199

Lastpage

206

Abstract

This paper presents an overview of MEMS devices for telecommunications and their reliability issues. MEMS for antenna switches, tunable capacitors, inductors, resonators and other devices have been extensively developed for wireless communication applications. For optical network infrastructure, MEMS for optical cross connects, gain equalizers, add-drop multiplexers, WDM/DWDM switches and others have been successfully demonstrated. Significant knowledge has been gained on MEMS failure modes and design/processing guidelines. Improvements on device lifetime and environmental robustness hold the key to ultimate success of MEMS product commercialization.

Keywords

micromechanical devices; optical communication equipment; radio equipment; reliability; MEMS design/processing; MEMS devices; MEMS failure modes; MEMS product commercialization; MEMS reliability; WDM/DWDM switches; add-drop multiplexers; antenna switches; device lifetime; environmental robustness; gain equalizers; optical cross connects; optical network infrastructure; resonators; telecommunications; tunable capacitors; tunable inductors; wireless communication; Capacitors; Communication switching; Microelectromechanical devices; Micromechanical devices; Optical fiber networks; Optical resonators; Optical switches; Telecommunication network reliability; Telecommunication switching; Wavelength division multiplexing;

fLanguage

English

Publisher

ieee

Conference_Titel

Custom Integrated Circuits Conference, 2003. Proceedings of the IEEE 2003

Print_ISBN

0-7803-7842-3

Type

conf

DOI

10.1109/CICC.2003.1249390

Filename

1249390