Title :
An automatic implementation of dynamic electromigration tests
Author :
Zhang, Wei ; Cheng, Y.H. ; Li, Z.G. ; Guo, W.L. ; Sun, Y.H. ; Li, X.X.
Author_Institution :
Dept. of Electron. Eng., Beijing Polytech. Univ., China
Abstract :
A computer controlled testing system built up with hp instruments is described for dynamic electromigration characterization under constant and pulsed DC stressing. Two specially designed specimens with built-in temperature sensor are also presented in cooperation with the system. A series of electromigration tests was performed in terms of current, temperature and frequency ramps. Typical experimental results are discussed in this paper
Keywords :
automatic testing; dynamic testing; electromigration; semiconductor device metallisation; semiconductor device testing; automatic testing; built-in temperature sensor; computer controlled testing; constant DC stressing; dynamic electromigration tests; hp instruments; pulsed DC stressing; Automatic control; Automatic testing; Control systems; Electromigration; Frequency; Instruments; Performance evaluation; Stress control; System testing; Temperature sensors;
Conference_Titel :
Microelectronic Test Structures, 1995. ICMTS 1995. Proceedings of the 1995 International Conference on
Conference_Location :
Nara
Print_ISBN :
0-7803-2065-4
DOI :
10.1109/ICMTS.1995.513980
