SEMATECH and the University of Texas cooperative research in semiconductor manufacturing technology

Author

Brown, Steven ; Pittman, Sarah E.

Author_Institution

Motorola Inc., USA

fYear

1995

fDate

16-17 May 1995

Firstpage

36

Lastpage

40

Abstract

An overview is provided of current research in microelectronics manufacturing technology being conducted by University of Texas graduate students for SEMATECH´s Factory Integration division. As part of these planned internships, the candidates for Master of Science degrees in Operations Research selected academic report topics related to factory performance issues for advanced-technology wafer fabrication facilities. The relevance of such work to understanding the robustness of high-technology production operations is discussed. Additionally, the paper critiques the internship program itself, sharing successes and lessons learned

Keywords

electronic engineering education; factory automation; integrated circuit manufacture; research initiatives; semiconductor technology; technology transfer; SEMATECH; University of Texas; advanced-technology wafer fabrication facilities; cooperative research; factory performance issues; graduate students; high-technology production operations; microelectronics manufacturing; operations research; planned internships; semiconductor manufacturing technology; Analytical models; Costs; Fabrication; Microelectronics; Operations research; Performance analysis; Production facilities; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor device reliability;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 1995., Proceedings of the Eleventh Biennial

Conference_Location

Austin, TX

ISSN

0749-6877

Print_ISBN

0-7803-2596-6

Type

conf

DOI

10.1109/UGIM.1995.514113

Filename

514113