Title :
P1J-8 Energy Trapping in HBARs Based on Cubic Crystals
Author :
Alekseev, S.G. ; Kotelyanskii, I.M. ; Mansfeld, G.D. ; Polzikova, N.I.
Author_Institution :
Inst. of Radioeng. & Electron., Moscow
Abstract :
The theory of energy trapping in HBAR based on cubic crystals and experimental confirmation of the theoretical results are presented
Keywords :
Q-factor; acoustic resonators; crystal resonators; piezoelectric thin films; yttrium compounds; HBAR energy trapping; Q-factor; Y3Al5O12; Y3AG; YAG; cubic crystals; high overtone bulk acoustic wave resonators; yttrium aluminum garnet; Acoustic waves; Attenuation; Crystals; Electrodes; Electron traps; Piezoelectric films; Piezoelectric materials; Q factor; Resonance; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.228