Title :
3K-5 Electrical Parameter Extraction of a Flexural Plate Wave Device Using the Finite Element Method
Author :
Matthews, G.I. ; Ippolito, S.J. ; Wlodarski, W. ; Kalantar-zadeh, K.
Author_Institution :
Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic.
Abstract :
A study was conducted on the use of the Finite Element (FE) method to determine key electrical parameters of a Flexural Plate Wave (FPW) device. This paper illustrates that the FE method can be successfully applied to extract admittance and frequency response characteristics of complex acoustic wave devices. Second order effects such as electromagnetic feedthrough, triple transit and diffraction can be accounted for, which cannot be easily evaluated concurrently by other methods. Excellent agreement has been achieved between this novel approach and an alternative formulation based on a spectral Green´s function
Keywords :
Green´s function methods; finite element analysis; surface acoustic wave devices; surface acoustic waves; ANSYS; Lamb wave; acoustic wave devices; admittance response; diffraction; electrical parameter extraction; electromagnetic feedthrough; finite element method; flexural plate wave device; frequency response; second order effects; spectral Green´s function; triple transit; Acoustic devices; Acoustic waves; Biomedical acoustics; Electrodes; Finite element methods; Gold; Green´s function methods; Parameter extraction; Piezoelectric materials; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.290
