DocumentCode
235233
Title
Study of electro-migration resistivity of micro bump using SnBi solder
Author
Murayama, Kei ; Aizawa, Mitsuhiro ; Higashi, Masatake
Author_Institution
Interconnect Technol. Dev. Dept., Shinko Electr. Ind. Co., Ltd., Nagano, Japan
fYear
2014
fDate
27-30 May 2014
Firstpage
1166
Lastpage
1172
Abstract
There has been a great discussion about electro-migration behavior in semiconductor area. And it has been often discussed that electro-migration behavior of the flip chip package using Sn-Ag bump. However, little study has been done to explore the electro-migration behavior of low temperature solder such as a Sn-Bi solder. In this report, we investigated electro-migration behaviors of micro pillar bump (100 μm diameter) and fine pitch micro bump (25 μm diameter) using Sn57wt%Bi solder. In the case of micro pillar bump, Bi quickly migrated and accumulated on the anode side (Cu pillar) and Sn migrated to the cathode side (substrate pad). And interconnect resistance was quickly increased 80 % from initial during about 150 hours. There was no electrically break failure and it was stabilized at 80% of initial resistance for more than 2800 hours. On the other hand, in the case of fine pitch micro bump, almost of Sn atoms were consumed to form Cu-Sn or Ni-Sn intermetallic compounds (IMCs) after bonding process. The resistance increase was less than 9 %, it is stabilized even for more than 2200 hours and there were no electrically break failure. Additionally, it is evident from electromagnetic field simulation that the maximum current density of the fine pitch micro bump are less than half compared with that of Cu-pillar bumps. Fine pitch micro bump using Sn57 Bi solder is promising candidates for the bonding technology of high performance packages.
Keywords
bismuth alloys; electromigration; flip-chip devices; integrated circuit bonding; integrated circuit interconnections; integrated circuit packaging; integrated circuit reliability; tin alloys; Sn-Bi; bonding process; cathode side; fine pitch microbump; flip chip package; interconnect resistance; intermetallic compounds; microbump electromigration resistivity; micropillar bump; size 25 mum; substrate pad; Bismuth; Current density; Gold; Nickel; Resistance; Substrates; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC), 2014 IEEE 64th
Conference_Location
Orlando, FL
Type
conf
DOI
10.1109/ECTC.2014.6897437
Filename
6897437
Link To Document