Issues in MEMS macromodeling

Author

Fedder, Gary K.

Author_Institution

Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA

fYear

2003

fDate

7-8 Oct. 2003

Firstpage

64

Lastpage

69

Abstract

AHDL modeling of MEMS components for system simulation is slowly maturing, however many issues remain regarding interoperability and composability. A discussion of MEMS natures, hierarchy and model partitioning helps to introduce the issues. Specific conventions for interoperability include choice of component reference frame and associated reference directions. A composite discipline extension to AHDLs is proposed to enable a single-port representation of micromechanical connection points in 2D and 3D space.

Keywords

circuit simulation; digital simulation; hardware description languages; micromechanical devices; open systems; semiconductor device models; AHDL modeling; MEMS components; MEMS macromodeling; interoperability; microelectromechanical systems; micromechanical connection points; single port representation; system simulation; Electronic circuits; Fabrication; Libraries; Microelectromechanical systems; Microelectronics; Micromechanical devices; Microstructure; Robots; Springs; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Behavioral Modeling and Simulation, 2003. BMAS 2003. Proceedings of the 2003 International Workshop on

Print_ISBN

0-7803-8135-1

Type

conf

DOI

10.1109/BMAS.2003.1249859

Filename

1249859