Preparation of a Micro Rubidium vapor cell and its integration in a chip-scale atomic magnetometer

Micro Rubidium vapor cell has very important research values in many fields including atomic magnetometer, atomic clock, atomic gyroscope and so on. In this study, a new method to fabricate the micro Rubidium vapor cell has been investigated and uniform wafer-level micro Rubidium vapor cells, which could be used in atomic devices, have been prepared successfully by the proposed process. First of all, the fabrication process is introduced. Then the prepared uniform wafer-level micro Rubidium vapor cell has been characterized by Energy Dispersive Spectroscopy (EDS) and Ultraviolet spectrophotometer. And the result demonstrates the existing of Rubidium and shows that the SNR (Signal to Noise Ratio) of the micro Rubidium vapor cell is high, which suits for atomic devices as well as other applications. At last, its integration in a Chip-Scale atomic magnetometer is presented.