Title :
A novel field plate structure under high voltage interconnections
Author :
Fujishima, Naoto ; Takeda, Hisao
Author_Institution :
Fuji Electric Corp.
Keywords :
Breakdown voltage; Conductivity; Displays; Electrodes; Epitaxial layers; Fabrication; Isolation technology; Oxidation; Power supplies; Telecommunications;
Conference_Titel :
Power Semiconductor Devices and ICs, 1990. ISPSD '90. Proceedings of the 2nd International Symposium on
DOI :
10.1109/ISPSD.1990.991066
