Chemical mechanical properties of perovskite oxide abrasive grain: First-principles approach

To elucidate the chemical mechanical polishing (CMP) performance of perovskite oxide abrasive grain for glass, we investigated electronic states of CaZrO₃ and SrFeO₃ by the first-principles calculation. The calculation results show that the Zr and Fe atoms in CaZrO₃ and SrFeO₃ take low valence states. We suggest that the metal atoms in perovskite oxide are effective for the glass polishing since low-valent metal atoms can weaken the Si-O bond of the glass surface by electron donation based on our reported CMP mechanism of glass by CeO₂ abrasive grains.