Study on evaluation method for polishing pad surface topography based on optical fourier transform

Author

Khajornrungruang, Panart ; Suzuki, Kenji ; Kushida, Takashi ; Tajiri, Takahiro ; Matsuo, Hiroshi ; Mochizuki, Yoshihiro ; Hiyama, Hirokuni ; Kimura, K.

Author_Institution

Dept. of Mech. Inf. Sci. & Technol., Kyushu Inst. of Technol. (KYUTECH), Fukuoka, Japan

fYear

2014

fDate

19-21 Nov. 2014

Firstpage

205

Lastpage

208

Abstract

An optical technique based on the optical Fourier transform has been developed to evaluate the characteristics of polishing pad surface topography. The power spectrum from the optical Fourier transform, which correlates with the diffracted light intensity distribution from the diffused reflection laser light of the polishing pad surface, is observed by an area sensor camera. Then, the correlation between the spatial frequency characteristic of the polishing pad topographies and the material removal rate are investigated.

Keywords

Fourier transform optics; light diffraction; measurement by laser beam; optical microscopy; polishing; surface topography; surface topography measurement; light intensity distribution; optical Fourier transform; polishing pad surface topography; power spectrum; reflection laser; sensor camera; Fourier transforms; Materials; Optical reflection; Optical surface waves; Surface topography; Surface waves; Fourier transform; conditioning; laser; optical; polishing pad; surface topography;

fLanguage

English

Publisher

ieee

Conference_Titel

Planarization/CMP Technology (ICPT), 2014 International Conference on

Conference_Location

Kobe

Print_ISBN

978-1-4799-5556-5

Type

conf

DOI

10.1109/ICPT.2014.7017281

Filename

7017281