Title :
Modelling of shear-horizontal-type surface acoustic waves and its application to COM-based device simulation
Author :
Hashimoto, Ken-Ya ; Omori, Tatsuya ; Yamaguchi, Masatsune
Author_Institution :
Dept. of Electron. & Mech. Eng., Chiba Univ., Japan
Abstract :
Describes a simple technique for the simulation of devices employing highly piezoelectric shear-horizontal (SH) type surface acoustic waves (SAWs). First, propagation and excitation characteristics of the SH-type SAWs are modelled by the application of Plessky´s COM model and its extension by Koskela et al. to the discrete Green function theory. Parameters appearing in the model are determined by the numerical fitting with the rigorous numerical analysis. Then a generalised procedure is presented to derive COM equations of a conventional form from the modelled SH-type SAW propagation and excitation characteristics. Finally, the frequency response of a resonator is discussed based on the derived COM equations, showing how effectively the present technique is applied to device simulation
Keywords :
Green´s function methods; acoustic wave propagation; coupled mode analysis; frequency response; surface acoustic wave devices; COM-based device simulation; Plessky´s COM model; coupling-of-modes model; device simulation; discrete Green function theory; excitation characteristics; frequency response; generalised procedure; numerical fitting; propagation characteristics; shear-horizontal-type surface acoustic waves; Acoustic propagation; Acoustic waves; Equations; Green function; Numerical analysis; Piezoelectric devices; Sawing machines; Surface acoustic wave devices; Surface acoustic waves; Surface fitting;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991593
