DocumentCode
236142
Title
Volume measurements of 28Si spheres by an improved optical interferometer and ellipsometer to determine the Avogadro constant
Author
Kuramoto, Naoki ; Azuma, Yasushi ; Inaba, Hiromi ; Hong, F.-L. ; Fujii, Kenichi
Author_Institution
Nat. Metrol. Inst. of Japan (NMIJ), Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
fYear
2014
fDate
24-29 Aug. 2014
Firstpage
210
Lastpage
211
Abstract
In the determination of the Avogadro constant using the x-ray crystal density method with the 28Si-enriched crystal prepared by the International Avogadro Coordination, the volume measurement and surface analysis of the 28Si spheres play a crucial role. For the accurate volume determination, an optical interferometer with a flat etalon has been improved taking account of the geometrical shape of the optical components. Furthermore, a new spectroscopic ellipsometer with a sphere rotation system has been installed for the accurate surface analysis. Details of the optical interferometer and ellipsometer are described.
Keywords
elemental semiconductors; ellipsometers; light interferometers; optical constants; silicon; surface topography measurement; volume measurement; Avogadro constant determination; Si; Si sphere rotation system; Si-enriched crystal; X-ray crystal density method; flat etalon; geometrical shape; improved optical interferometer; international Avogadro coordination; spectroscopic ellipsometer; surface analysis; volume measurement; Adaptive optics; Crystals; Laser beams; Optical interferometry; Silicon; Uncertainty; Volume measurement; Avogadro constant; diameter measurement; optical interferometer; silicon crystal; spectroscopic ellipsometer; volume measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on
Conference_Location
Rio de Janeiro
ISSN
0589-1485
Print_ISBN
978-1-4799-5205-2
Type
conf
DOI
10.1109/CPEM.2014.6898333
Filename
6898333
Link To Document