DocumentCode :
2361932
Title :
Temperature sensitivity of plate modes in ST quartz
Author :
Anisimkin, I.V. ; Gulyaev, Yu.V. ; Anisimkin, V.I. ; Verona, E.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Volume :
1
fYear :
2001
fDate :
2001
Firstpage :
423
Abstract :
On considering 13 modes with shear horizontal (SH) polarization, propagating perpendicular to the x-axis in a ST quartz plate, it is experimentally shown and theoretically verified how the temperature coefficient of delay (TCD) and its behavior vs. temperature depend monotonically on the order n of the mode. This property is attributed to the different sensitivities of the modes towards temperature variations in c12, c14 and c44 elastic moduli. The modes sensitivities towards density ρ, elastic moduli c11, c13, c33 and plate thickness h are either temperature independent or negligibly small. The best thermal stability (TCD≈0) over the widest temperature range (2-92°C) has been detected for the 6th mode, while the largest one (350 ppm/°C) has been measured for the 13th mode, at 47°C. For comparison, five Lamb modes, propagating along the x-direction in the same quartz plate, show a non monotonic dependence of the thermal coefficient on the mode number, a temperature independent TCD in the range 2-92°C, a minimum and maximum value of the TCD (≈0.7 ppm/°C and ≈100 ppm/°C) for the 0th symmetric mode and for the 1st anti-symmetric mode, respectively
Keywords :
quartz; surface acoustic wave devices; thermal stability; 2 to 92 C; Lamb mode; ST-quartz; SiO2; acoustic wave device; density; elastic moduli; plate mode; shear horizontal polarization; temperature coefficient of delay; temperature sensitivity; thermal coefficient; thermal stability; Acoustic propagation; Acoustic waves; Frequency; Propagation delay; Substrates; Temperature control; Temperature dependence; Temperature distribution; Temperature sensors; Thermal conductivity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
Type :
conf
DOI :
10.1109/ULTSYM.2001.991654
Filename :
991654
Link To Document :
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