A broadband electromagnetic characterization of Ba0.7Sr0.3TiO3 thin films on coplanar waveguide up to microwave frequencies

Author

Ndiaye-Tandia, Oumy ; Charles, Michael ; Allal, Djamel ; Bocquet, Bertrand

Author_Institution

Lab. Nat. de Metrol. et d´Essais, Trappes, France

fYear

2014

fDate

24-29 Aug. 2014

Firstpage

342

Lastpage

343

Abstract

A method for determining the electromagnetic properties of Ba_0.7Sr_0.3TiO₃ (BST) thin films is presented in this paper. At first we introduce a broadband characterization method based on the extraction of the intrinsic properties of a substrate from the measurement of a kit composed of five coplanar waveguides and then we employed an accurate on wafer TRL calibration technique to measure the permittivity of the BST thin film.

Keywords

barium compounds; calibration; coplanar waveguides; ferroelectric thin films; microwave materials; microwave measurement; permittivity measurement; strontium compounds; BST thin film; Ba_0.7Sr_0.3TiO₃; broadband electromagnetic characterization; coplanar waveguide; intrinsic property extraction; microwave frequency; permittivity measurement; wafer TRL calibration technique; Coplanar waveguides; Electromagnetic waveguides; Microwave circuits; Permittivity; Permittivity measurement; Substrates; Transmission line measurements; BST; Permittivity; S parameters; coplanar waveguide; ferroelectrics;

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on

Conference_Location

Rio de Janeiro

ISSN

0589-1485

Print_ISBN

978-1-4799-5205-2

Type

conf

DOI

10.1109/CPEM.2014.6898399

Filename

6898399