Electromagnetic analysis of micromachined devices

Author

Carbonell, J. ; Danglot, J. ; Mélique, X. ; Dupuis, O. ; Lheurette, E. ; Mounaix, P. ; Vanbésien, O. ; Lippens, D.

Author_Institution

Inst. d´´Electron et de Microelectron. du Nord, Univ. des Sci. et Tech. de Lille Flandres Artois, Villeneuve d´´Ascq, France

fYear

1998

fDate

3-4 Sep 1998

Firstpage

50

Lastpage

53

Abstract

In this paper, the electromagnetic behaviour of micromachined devices aimed at operating at terahertz frequency is specially addressed. We considered respectively: (i) new fabrication techniques for free-standing air-bridged structures for planar device arrays; (ii) high-speed low-loss coplanar wave guides deposited on a membrane in GaAs technology; (iii) metallic/air photonic band gap structures used in filtering and guiding sections; and (iv) a radiating antenna deposited on low temperature grown GaAs used in pulse optical techniques for Terahertz generation

Keywords

coplanar waveguide components; electromagnetic field theory; gallium arsenide; membranes; micromachining; microwave photonics; photonic band gap; submillimetre wave devices; EM analysis; GaAs; GaAs technology; THz generation; coplanar wave guides; electromagnetic analysis; fabrication techniques; filtering sections; free-standing air-bridged structures; guiding sections; high-speed low-loss CPW; low temperature grown GaAs; membrane; metallic/air PBG structures; micromachined devices; photonic band gap structures; planar device arrays; pulse optical techniques; radiating antenna; terahertz frequency operation; Antenna arrays; Biomembranes; Electromagnetic analysis; Electromagnetic devices; Fabrication; Frequency; Gallium arsenide; Optical arrays; Optical filters; Optical pulse generation;

fLanguage

English

Publisher

ieee

Conference_Titel

Terahertz Electronics Proceedings, 1998. THz Ninety Eight. 1998 IEEE Sixth International Conference on

Conference_Location

Leeds

Print_ISBN

0-7803-4903-2

Type

conf

DOI

10.1109/THZ.1998.731661

Filename

731661