Micromachined capacitive transducer array for imaging in air

Author

McIntosh, J.S. ; Hutchins, D.A. ; Etcheverry, G. ; Billson, D.R. ; Noble, R.A. ; Davies, R.R. ; Koker, L.

Author_Institution

Sch. of Eng., Warwick Univ., Coventry, UK

Volume

2

fYear

2001

fDate

2001

Firstpage

929

Abstract

Micromachined transducer arrays for use in air have been fabricated using a low temperature process to give 1 mm square transducer elements. Cross-coupling between elements has been measured, and is due to a wave which travels at a velocity close to that in air. Individual elements have been used to image reflecting objects in air, and to locate simple point and line reflectors. In addition, it is shown that an image of a coin can be produced, without the need for focussing in air. The resolution of such images has been estimated by scanning a single device over a step feature on a surface. A rectangular array has also. been used a passive receiver to image the beam emitted by a focussed air-coupled device

Keywords

acoustic receivers; capacitive sensors; image reconstruction; microsensors; ultrasonic imaging; ultrasonic transducer arrays; US imaging; element cross-coupling; ellipse-crossing techniques; focused air-coupled device; image reconstruction; low temperature fabrication process; micromachined capacitive US transducer array; micromachined ultrasonic transducers; passive receiver arrays; pitch-catch mode; rectangular array; Biomembranes; Etching; Focusing; Metal-insulator structures; Pulse amplifiers; Reflection; Silicon; Surface reconstruction; Temperature; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991872

Filename

991872