Title :
ESD induced capacitor shorts
Author :
Weaver, Elissha M. ; Yots, Christian M.
Author_Institution :
Gallium Arsenide Oper., Texas Instrum. Inc., Dallas, TX, USA
Abstract :
The cause of gross capacitor shorts on Gallium Arsenide MMIC´s was traced to a resist removal operation in the plating process. This paper presents a methodology for the identification and removal of ESD sources found on production equipment used in the fabrication of GaAs devices on 100 mm substrates.
Keywords :
III-V semiconductors; MMIC; capacitors; electrostatic discharge; gallium arsenide; ESD; GaAs; MMIC; capacitor short; fabrication; gallium arsenide device; plating; production equipment; resist removal; Capacitors; Electrostatic discharges; Gallium compounds; MMICs;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 1996. Proceedings
Print_ISBN :
1-878303-69-4
DOI :
10.1109/EOSESD.1996.865123
