Title :
Fabrication of carbon-nanotube enhanced piezoelectric membrane-based biosensor
Author :
Xu, Ting ; Wang, Zhihong ; Miao, Jianmin
Author_Institution :
Micromachines Centre, Nanyang Technol. Univ., Singapore
Abstract :
In this article, we report a novel method of fabrication of carbon-nanotube (CNT) enhanced piezoelectric membrane based biosensor. The piezoelectric membrane was fabricated by micro-machining technique and CNTs were synthesized on the backside of the membrane using thermal chemical vapor deposition. CNT has extraordinary electrochemical property and it possesses a hollow core and large specific surface area which is suitable for storing guest molecules. Therefore, it was introduced onto the piezoelectric membrane as bio-receptor to capture the bio-molecules.
Keywords :
biomembranes; biosensors; carbon nanotubes; chemical vapour deposition; micromachining; molecular biophysics; piezoelectric materials; biomolecules; bioreceptor; carbon-nanotube; electrochemical property; micromachining technique; piezoelectric membrane-based biosensor; thermal chemical vapor deposition; Biosensors; Carbon nanotubes; Fabrication; Nanoelectronics;
Conference_Titel :
Nanoelectronics Conference, 2008. INEC 2008. 2nd IEEE International
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-1572-4
Electronic_ISBN :
978-1-4244-1573-1
DOI :
10.1109/INEC.2008.4585548