Title :
Analysis of charge injection processes including ESD in MEMS
Author :
Greason, William D.
Author_Institution :
Western Ontario Univ., London
Abstract :
The effect of charge injection due to HBM ESD and triboelectrification in capacitive MEMS structures is analyzed. The results show that as feature size is reduced, the effect remains constant for triboelectrification while ESD injected charge produces a change which is inversely proportional to the square of the gap separation.
Keywords :
charge injection; electrostatic discharge; micromechanical devices; triboelectricity; HBM ESD; capacitive MEMS structures; charge injection processes; electrostatic discharge; gap separation; human body model; triboelectrification; Biological system modeling; CMOS technology; Capacitance; Conductors; Electrostatic analysis; Electrostatic discharge; Humans; Microelectromechanical systems; Micromechanical devices; Nanoelectromechanical systems;
Conference_Titel :
29th Electrical Overstress/Electrostatic Discharge Symposium, 2007. EOS/ESD
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-58537-136-5
DOI :
10.1109/EOSESD.2007.4401742
