DocumentCode
2368080
Title
Analysis of charge injection processes including ESD in MEMS
Author
Greason, William D.
Author_Institution
Western Ontario Univ., London
fYear
2007
fDate
16-21 Sept. 2007
Abstract
The effect of charge injection due to HBM ESD and triboelectrification in capacitive MEMS structures is analyzed. The results show that as feature size is reduced, the effect remains constant for triboelectrification while ESD injected charge produces a change which is inversely proportional to the square of the gap separation.
Keywords
charge injection; electrostatic discharge; micromechanical devices; triboelectricity; HBM ESD; capacitive MEMS structures; charge injection processes; electrostatic discharge; gap separation; human body model; triboelectrification; Biological system modeling; CMOS technology; Capacitance; Conductors; Electrostatic analysis; Electrostatic discharge; Humans; Microelectromechanical systems; Micromechanical devices; Nanoelectromechanical systems;
fLanguage
English
Publisher
ieee
Conference_Titel
29th Electrical Overstress/Electrostatic Discharge Symposium, 2007. EOS/ESD
Conference_Location
Anaheim, CA
Print_ISBN
978-1-58537-136-5
Type
conf
DOI
10.1109/EOSESD.2007.4401742
Filename
4401742
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