• DocumentCode
    2369754
  • Title

    Realizing super-steep subthreshold slope with conventional FDSOI CMOS at low-bias voltages

  • Author

    Lu, Z. ; Collaert, N. ; Aoulaiche, M. ; De Wachter, B. ; De Keersgieter, A. ; Fossum, J.G. ; Altimime, L. ; Jurczak, M.

  • Author_Institution
    Imec, Leuven, Belgium
  • fYear
    2010
  • fDate
    6-8 Dec. 2010
  • Abstract
    We report the first demonstration of a super-steep subthreshold slope (SS) (the smallest ever reported experimentally) with ultra-thin BOX (UTBOX) FDSOI standard CMOS transistors. Record steep SS of 72μV/dec for Lg=25nm and 58μV/dec for Lg=55nm at room temperature are achieved with low voltages. The device also exhibits high ON-state current (~100μA/μm), as compared to other devices from this class. As a result, ION/IOFF ratio of 108 is realized with 0.5V gate swing for Lg=55nm MOSFETs. The excellent reliability is also demonstrated.
  • Keywords
    CMOS integrated circuits; MOSFET; MOSFET; conventional FDSOI CMOS; low-bias voltages; super-steep subthreshold slope; ultra-thin BOX FDSOI standard CMOS transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2010 IEEE International
  • Conference_Location
    San Francisco, CA
  • ISSN
    0163-1918
  • Print_ISBN
    978-1-4424-7418-5
  • Electronic_ISBN
    0163-1918
  • Type

    conf

  • DOI
    10.1109/IEDM.2010.5703377
  • Filename
    5703377