DocumentCode
2369879
Title
Automatic Recognition of Defect Signatures and Notification of Tool Malfunctions - IECON´06
Author
Toyoshima, Tetsuro ; Yamada, Eiji ; Yamamoto, Toshio ; Imai, Katsuki
Author_Institution
Production Technol. Dev. Center, Sharp Corp., Nara
fYear
2006
fDate
6-10 Nov. 2006
Firstpage
5458
Lastpage
5462
Abstract
We have developed an automatic method that efficiently detects the defect signatures of substrates and identifies possible problems pertaining to LSI/TFT-LCD manufacturing processes and tools. This system, which has no built-in libraries, can be applied to the mass production line of thin film devices. This method is useful to quickly detect problems that have been overlooked thus far
Keywords
pattern recognition; production engineering computing; production equipment; thin film devices; IECON´06; LSI manufacturing processes; TFT-LCD manufacturing processes; automatic recognition; defect signatures; manufacturing tools; mass production line; thin film devices; tool malfunctions notification; Humans; Inspection; Large scale integration; Libraries; Manufacturing processes; Pattern analysis; Pattern recognition; Production; Substrates; Thin film devices;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE Industrial Electronics, IECON 2006 - 32nd Annual Conference on
Conference_Location
Paris
ISSN
1553-572X
Print_ISBN
1-4244-0390-1
Type
conf
DOI
10.1109/IECON.2006.347929
Filename
4153293
Link To Document