DocumentCode
2370993
Title
Statistical characterization of trap position, energy, amplitude and time constants by RTN measurement of multiple individual traps
Author
Nagumo, Toshiharu ; Takeuchi, Kiyoshi ; Hase, Takashi ; Hayashi, Yoshihiro
Author_Institution
LSI Res. Lab., Renesas Electron. Corp., Sagamihara, Japan
fYear
2010
fDate
6-8 Dec. 2010
Abstract
Distributions of trap position, energy, amplitude, time constants of random telegraph noise and their correlation are examined by characterizing multiple individual traps. The traps detected were not uniformly distributed in the energy space. Contrary to the elastic tunneling model, there was no correlation between the time constants and depth-wise position.
Keywords
elasticity; electric noise measurement; semiconductor device measurement; semiconductor device noise; statistical distributions; tunnelling; amplitude distribution; energy distribution; random telegraph noise measurement; time constant distribution; trap detection; trap position distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2010 IEEE International
Conference_Location
San Francisco, CA
ISSN
0163-1918
Print_ISBN
978-1-4424-7418-5
Electronic_ISBN
0163-1918
Type
conf
DOI
10.1109/IEDM.2010.5703437
Filename
5703437
Link To Document