DocumentCode :
2371154
Title :
Ferroelectric thin-film characterization through use of coplanar waveguide varactors
Author :
Brown, Dean ; Qumsiyeh, Maher ; Subramanyam, Guru ; Patterson, Maxx ; Zhang, Clara H.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Dayton, Dayton, OH, USA
fYear :
2012
fDate :
25-27 July 2012
Firstpage :
149
Lastpage :
153
Abstract :
This paper investigates the implementation of a least squares estimation of varactor capacitance values across a wafer for reasons of characterizing thin-film ferroelectric Ba0.6Sr0.4TiO3, barium strontium titanate (BST). The varactor design utilized for this characterization as well as an equivalent schematic representation of the device used will be presented. Comparisons between the estimated thin-film performance and those of previously presented results will also be discussed.
Keywords :
barium compounds; coplanar waveguides; ferroelectric devices; least squares approximations; strontium compounds; thin film devices; varactors; BST; Ba0.6Sr0.4TiO3; barium strontium titanate; coplanar waveguide varactors; ferroelectric thin-film characterization; least squares estimation; Ferroelectric films; electromagnetic modeling; thin film circuits; varactors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Aerospace and Electronics Conference (NAECON), 2012 IEEE National
Conference_Location :
Dayton, OH
ISSN :
0547-3578
Print_ISBN :
978-1-4673-2791-6
Type :
conf
DOI :
10.1109/NAECON.2012.6531046
Filename :
6531046
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2371154
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