A Phase Shifter by LTCC Substrate with an RF-MEMS Switch

12.5 GHz band digital phase shifters to control a beam direction for an Active Integrated Phased Array Antenna (AIPAA) are designed and fabricated an RF-MEMS device and a LTCC substrate. We designed and fabricated low loss RF-MEMS wave guide (Lt0.5 dB) and 4-bit LTCC phase shifters with small-size (10 mm times 13 mm times 0.55 mm). From the experiment data, the insertion loss of RF-MEMS device and LTCC phase shifter is measured to be about 0.5 dB and about 1 dB at 12.5 GHz, respectively. And an integrated RF-MEMS SPDT switches on an LTCC phase shifter by using flip-chip bonding are measured the insertion loss is about 2.0 dB at 12.5 GHz per 1 bit.