DocumentCode
2373271
Title
Session II Microelectronics, micromechanics and technology of measurements
fYear
2008
fDate
1-5 July 2008
Firstpage
54
Lastpage
54
Abstract
Start of the above-titled section of the conference proceedings record.
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2008. EDM 2008. 9th International Workshop and Tutorials on
Conference_Location
Novosibirsk
ISSN
1815-3712
Print_ISBN
978-5-7782-0893-3
Type
conf
DOI
10.1109/SIBEDM.2008.4585853
Filename
4585853
Link To Document