• DocumentCode
    2373271
  • Title

    Session II Microelectronics, micromechanics and technology of measurements

  • fYear
    2008
  • fDate
    1-5 July 2008
  • Firstpage
    54
  • Lastpage
    54
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials, 2008. EDM 2008. 9th International Workshop and Tutorials on
  • Conference_Location
    Novosibirsk
  • ISSN
    1815-3712
  • Print_ISBN
    978-5-7782-0893-3
  • Type

    conf

  • DOI
    10.1109/SIBEDM.2008.4585853
  • Filename
    4585853