Design and simulation of a multistable nano-actuator

The design of a monolithic multistable nano-actuator is presented. Then, a mathematical model and a finite element model (FEM) are constructed and compared. This multistable nano-actuator is based on four parallel coupled bistable modules. Each bistable module uses three central clamped bistable buckled beams as the bistable mechanism. In order to have an output at nano-scale, a flexible hinges based stroke reducing structure is integrated for each bistable module. A bistable module has two stable output positions. The four bistable modules are coupled through levers which are connected by flexible hinges in the aim to get sixteen discrete output positions. By appropriate design, these output positions can be linearly distributed over an axis. The designed nano-actuator presented in this work has linearly distributed output positions from 0 to 150nm with a constant step about 10nm.