BAW resonators reliability in the GHz range

Bulk acoustic wave (BAW) resonators are very promising candidates for Giga Hertz applications. In this context it becomes really important to analyse the behavior of these structures under harsh environmental conditions and severe operating conditions. A contribution to reliability studies of film bulk acoustic resonators (FBAR) and particularly solidly mounted resonators (SMR) is presented. X-rays and RF measurements allowed electrical and structural aging assessment in microstructures. For this purpose two experimental benches were set-up: one X-ray based (including diffraction, radiography and fluorescence analysis) and a very high-spatial resolution infrared, in-situ thermal mapping apparatus. In fine, some advices are formulated for the future realization of SMR