Title :
Membrane based actuator-integrated force arrays
Author :
Bousaba, J.E. ; Bobbio, S.M. ; Goodwin-Johansson, S. ; Kellam, M.D. ; Dudley, B.W. ; Jacobson, J.D. ; Jones, S.K. ; DuBois, T.D. ; Tranjan, F.M.
Author_Institution :
Dept. of Electr. Eng., North Carolina Univ., Charlotte, NC, USA
Abstract :
Integrated Force Arrays (IFAs) are membrane based actuators that are made of polyimide material. They are metallized membranes that are flexible enough to undergo substantial deformation when a voltage is applied. IFAs can be patterned using the techniques of VLSI electronics. They can be integrated in arrays to form complex systems that have wide range of applications. The theory of operation and the methods of construction are presented
Keywords :
membranes; metallisation; microactuators; photolithography; polymer films; VLSI electronics; complex systems; electrically deformable flexible membranes; integrated force arrays; membrane based actuators; metallized membranes; photolithographic exposure; polyimide material; Actuators; Biomembranes; Chemical technology; Chemistry; Jacobian matrices; Metallization; Microelectronics; Polyimides; Very large scale integration; Voltage;
Conference_Titel :
Electronic Components and Technology Conference, 1994. Proceedings., 44th
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-0914-6
DOI :
10.1109/ECTC.1994.367530
