Title :
2001 Microelectromechanical Systems Conference (Cat. No. 01EX521)
Abstract :
The following topics are dealt with: BioMEMS; packaging/assembly; RF MEMS; optics and MOEMS
Keywords :
micromechanical devices; BioMEMS; MOEMS; RF MEMS; assembly; microelectromechanical system; optics; packaging;
Conference_Titel :
Microelectromechanical Systems Conference, 2001
Conference_Location :
Berkeley, CA, USA
Print_ISBN :
0-7803-7224-7
DOI :
10.1109/MEMSC.2001.992726
