Title :
Method for estimating probe-dependent residual errors of wafer-level TRL calibration
Author :
Rumiantsev, Andrej ; Doerner, Ralf
Author_Institution :
Brandenburg Univ. of Technol. (BTU) Cottbus-Senftenberg, Cottbus, Germany
Abstract :
We present a method for estimating the probe-dependent residual errors of wafer-level TRL calibration. The method does not require additional measurement steps. It was verified experimentally for four industry standard RF probe types. The proposed method can be used, e.g., for confident cross-laboratory data sharing and comparison.
Keywords :
calibration; integrated circuit testing; measurement errors; microwave integrated circuits; microwave measurement; industry standard RF probe; probe dependent residual error estimation; thru reflect line calibration; wafer level TRL calibration; Calibration; Coplanar waveguides; Measurement uncertainty; Microwave measurement; Probes; Radio frequency; Standards; RF probes; S-parameters on-wafer calibration; calibration residual errors; wafer-level measurements;
Conference_Titel :
Microwave Measurement Conference (ARFTG), 2014 83rd ARFTG
Conference_Location :
Tampa, FL
DOI :
10.1109/ARFTG.2014.6899514
