Title :
A next queue algorithm in real time dispatching system of semiconductor manufacturing
Author :
Chen, Ying-Jen ; Yu, Gary ; Huang, Kuo-Sung ; Wang, Ivan
Author_Institution :
MACRONIX Int. Co. Ltd., Hsinchu, Taiwan
Abstract :
We demonstrate a next-queue rule in the real time dispatcher developed in MXIC FAB I. The outline of this system is presented first, then, the dispatching rule design logic is described. The real time dispatching system makes lot-dispatching work easy for operators. A next queue algorithm was developed in the implementation of the real time dispatcher. Finally, it has been proved that the dispatching algorithm not only improves FAB utilization but also reduces cycle time. Implementation of the real time dispatching system keeps reducing of cycle time and improves tool utilization by 7% from Q2 1999 to now
Keywords :
integrated circuit manufacture; process control; production control; FAB utilization; MXIC FAB I; cycle time reduction; dispatching algorithm; dispatching rule design logic; lot-dispatching work; next queue algorithm; real time dispatching system; semiconductor manufacturing; tool utilization; Databases; Dispatching; Etching; Ion implantation; Lithography; Logic design; Manufacturing industries; Production; Real time systems; Semiconductor device manufacture;
Conference_Titel :
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
0-7803-7392-8
DOI :
10.1109/ISSM.2000.993618
