Magnetically driven micropump produced by microstereolithography with ferrite nanoparticle composite photopolymer

A photopolymer containing magnetic nanoparticles was developed for applying magnetically driven micromachines. 7-nm diameter gamma-Fe₂O₃ nanoparticles coated by amorphous-SiO2 was used. The concentration of the magnetic nanoparticles was optimized by ultraviolet exposure. A magnetic microrotor of 6 mm diameter was produced by a molding process with a three-dimensional master model produced by microstereolithography using the nanoparticle composite photopolymer. A viscous micropump in which the magnetic rotor is included in a U-shaped channel was produced. Fluid transport using the viscous micropump was demonstrated.