Flexible micro thermoelectric generator based on electroplated Bi2+xTe3−x

Author

Schwyter, Etienne ; Glatz, Wulf ; Durrer, Lukas ; Hierold, Christofer

Author_Institution

Dept. of Mech. & Process Eng., Micro & Nanosystems, ETH Zurich, Zurich

fYear

2008

fDate

9-11 April 2008

Firstpage

46

Lastpage

48

Abstract

We present and discuss the fabrication process and the performance of a flexible micro thermoelectric generator with electroplated Bi_2+xTe_3-x thermocouples in a SU-8 mold. Demonstrator devices generate 278 muWcm^-2 at DeltaT_meas=40 K across the experimental set up. Based on model calculations, a temperature difference of DeltaT_G=21.4 K across the generator is assumed. Due to the flexible design and the chosen generator materials, the performance stays high even for curved contact surfaces. The measurement results correlate well with the model based design optimization predictions.

Keywords

bismuth compounds; electroplated coatings; electroplating; microfabrication; microsensors; thermocouples; thermoelectric conversion; Bi_2+xTe_3-x; SU-8 mold; design optimization; electroplated thermocouples; flexible microthermoelectric generator; thermoelectric generator microfabrication; Bismuth; Contacts; Copper; Electrodes; Fabrication; Gold; Temperature; Thermal conductivity; Thermal resistance; Thermoelectricity;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on

Conference_Location

Nice

Print_ISBN

978-2-35500-006-5

Type

conf

DOI

10.1109/DTIP.2008.4752949

Filename

4752949