DocumentCode :
2390550
Title :
Process Technology - Advanced Process and Integration Technology
fYear :
2006
fDate :
11-13 Dec. 2006
Firstpage :
1
Lastpage :
1
Keywords :
CMOS technology; FinFETs; Hafnium oxide; Insulation; Lithography; MOSFETs; Paper technology; Tin;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0438-X
Type :
conf
DOI :
10.1109/IEDM.2006.346951
Filename :
4154386
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2390550
